This part number has been discontinued, please contact our sales team for the closest alternative.

This product has been discontinued. Please contact us for the closest replacement - This product has been discontinued. Please contact us for the closest replacement - OLS5000 SET SAF STD/LWD 5-100X OLS5000 SET SAF STD 5-50X: 3D laser scanning microscope system for surface texture analysis with xy motorized stage. Maximum resolution in xy 120 nm, maximum resolution in z 5 nm, accuracy in xy: 1,5% of measurement length L, accuracy in z: <0.15 µm + 1% of measurement length L, repeatability in xy: 3sn-1 = 0.02 um, repeatability in z: sn-1=0.012 um (all with MPLApoN100xLEXT).