M-MS-MX61-4-2 MOTORIZED STAGE Motorized x/y scanning stage for MX63L, DSX510-MR, DSX510,-LARGE-FH, DSX110-EF, OLS5000-TM. Travel range 200 x 200 mm. Drive System: Stepping motor with ball screw (pitch 4 mm) drive. Resolution 0.01 µm, accuracy +/- 3 µm, reproducibility < 1 µm. Maximum travel speed 240 mm/s (depending on the controller). Stage surface: anotic coating with black lacquering. Maximum load 2000 g. Compatible with the following controller(s): Maerzhaeuser Tango. Including metal plate stage insert and installation manual.